小流量氣體質量流量控制器

FLEXI-FLOW 緊湊型質量流量控制器適用于工作壓力在真空和17 bar(a)條件下精確測量0…500 mln/min 和 0…20 ln/min之間的流量。儀表結合基于毛細管MEMS技術快速穩(wěn)定的熱式質量流量傳感器和可靠精確的旁路結構。基于TCS技術，建立準確的質量流量測量，不受溫度和管路壓力變化影響。與集成溫度和上下游壓力傳感器相結合，22種氣體的嵌入式數(shù)據(jù)庫實現(xiàn)精準集成轉換。多參數(shù)儀表可提供過程信息。

FLEXI-FLOW緊湊型質量流量控制器目前可選：

• “預配置高端型” (PA), 量程比 1:500, 流量 + 溫度 + 上下游壓力, 4 個量程 (FS, N2當量):
  Type FF-A500 – 500 mln/min
  Type FF-A2K0 – 2 ln/min
  Type FF-A5K0 – 5 ln/min
  Type FF-A20K – 20 ln/min
• “預配置標準型”(PS), 量程比 1:50, 流量 + 溫度, 4個量程 (FS, N2當量):
  Type FF-S500 – 500 mln/min
  Type FF-S2K0 – 2 ln/min
  Type FF-S5K0 – 5 ln/min
  Type FF-S20K – 20 ln/min
• “定制”(BtO), 量程比 1:1000; 可選量程0.5 和 20 ln/min (FS, N2當量),
  Type FF-C10: 流量 + 溫度
  Type FF-C11: 流量 + 溫度 + 上下游壓力;
  BtO型號也適用于多通道配置，高達8個通道。

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技術參數(shù)

Measurement / control system
Flow range (intermediate ranges available)	min. 0…500 mln/min max. 0…20 ln/min (based on N2)
Pressure ranges	PA: 0…17 bar(a) PS: not available BtO: FF-C10: not available / FF-C11: 0…17 bar(a)
Accuracy (incl. linearity) (based on actual calibration)	PA: ±0,8% Rd plus ±0,2% FS (N2/Air/O2); PS: ±1,5% Rd plus ±0,5% FS (N2/Air/O2); BtO: Up to ±0,5% Rd plus ±0,1% FS (N2/Air/O2); for other gases add conversion uncertainty; see multi gas table;
Repeatability	Flow sensor: < ±0,2% Rd; Pressure sensors: < ±0,2% FS
Turndown ratio	PS: 1:50 PA: 1:500 BtO: up to 1:1000
Max. operating pressure	16 bar g
Multi Gas/Multi Range	embedded gas data for 22 unique gases plus any mixture of these gases
Settling time (in control, typical)	< 150 ms
Long term stability	< 0,5% FS over period of 3 years; then < 0,2% FS per year
Control stability	< ± 0,1% FS (typical for 1 ln/min N2)
Operating temperature	0…50 °C
Mounting	any position, attitude sensitivity negligible
Temperature sensitivity	Flow sensor: zero 0,0015% FS/ºC; span 0,03% Rd/ºC; Pressure sensors: zero 0,16 mbar/ºC; span 0,05% Rd/ºC
Temperature accuracy	± 0,2 ºC (instrument body temperature)
Accuracy pressure sensors	±0,5% FS
Pressure sensitivity	standard: < 0,15% Rd/bar typical N2; with pressure correction: < 0,02% Rd typical N2
Leak integrity, outboard	tested < 2 x 10-9 mbar l/s He
Leak-by through closed valve	typical < 1 x 10-4 mbar·l/s He

Mechanical parts
Material (wetted parts)	aluminium, stainless steel, silicon nitride, epoxy, aluminium oxide, glass
Surface quality	< 1,6 mu Ra (<0,8 mu Ra for stainless steel body)
Pressure rating (PN)	16 bar(g) / 250 psig
Max. ΔP	16 bar(d); 20 ln/min models: 5 bar (d)
Process connections	BtO: compression type, push-in or face seal couplings; PS / PA: to be ordered separately
Seals	FKM 51415; valve seat: FFKM with PI film BtO option: for other materials contact factory
Weight	200 g with Aluminium body, 300 g with SS 316 body
Ingress protection	IP40
Instrument body	BtO: Aluminium or Stainless steel (selectable); PS / PA: Aluminium

Electrical properties
Power supply	24 Vdc ± 10%
Max. power consumption	2,0 Watt
Digital communication	Modbus RTU or FLOW-BUS (selectable)
Support interface	USB-C port for easy setup; Optional Bluetooth connection for monitoring
Electrical connection	9-pin D-sub (male)

Electrical connection
CE	EMC 2014/30/EU, RED 2014/53/EU, RoHS 2011/65/EU

技術參數(shù)如有變更，恕不另行通知。